1. Wet Etching
Anisotropy 원함
2. Plasma Etching
plasma potential 키우기 원함
3. Parallel Plate Plasma Etching
DC self-bias
4. Reactive Ion Ethcing
plasma density 원함
5. Magnetically Enhanced RIE
high density plasma (1011/cm3)원함
6. ECR, Helical, TCP, DPS, Helicon,HRe-
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