ADI : After Development Inspection
ACI : After Cleaning Inspection
FI : Final Inspection
DI : Developing Inspection
CD skew (CD bias) = ACI - ADI (삼성) = FI - DI (하이닉스)
CD 측정 설비 : ILS(In-line SEM) (Hitachi SEM)
단면 관찰 설비 : Broken SEM (SK), VSEM (Samsung)